Position:Home > News

Composition and application of CVD system

Time：2019-08-27

　　The CVD system is composed of a high-temperature vacuum tube furnace, gas circuit and vacuum system.

CVD system is the abbreviation of Chemical Vapor Deposition, which refers to the gas phase reaction at high temperature, such as the thermal decomposition of metal halides, organic metals, hydrocarbons, etc., hydrogen reduction or chemical reaction of its mixed gas at high temperature to precipitate Methods using inorganic materials such as metals, oxides, and carbides. This technology was originally developed as a means of coating, but it is not only applied to the coating of heat-resistant materials, but also applied to the refining of high-purity metals, powder synthesis, and semiconductor thin films. It is a very characteristic technical field.

Its technical characteristics are:
(1) High melting point substances can be synthesized at low temperature;
(2) The forms of precipitated substances are single crystal, polycrystalline, whisker, powder, thin film, etc.;
(3) Not only can coating on the substrate, but also Powder surface coatings, etc., can synthesize high melting point substances especially at low temperatures, and have made contributions to energy conservation, and are promising as a new technology.

Prev:Tube furnace issues that need attention

Next:How to clean ceramic crucible in muffle furnace

Composition and application of CVD system

Single-Zone Tube Furnace

Multi-Zone Tube Furnace

Rotary Tube Furnace

Vertical Tube Furnace

Slideway Tube Furnace

RTP fast Annealing Furnace

Lab Scale Pyrolysis Furnace

Diffusion Oxidation Tube Furnace

Ultrasonic Spray Pyrolysis Furnace

High temperature high pressure

OLED material purification

400℃-1200℃ Box Furnace

1300℃-1400℃ Box Furnace

1500℃-1700℃ Box Furnace

Bell Type Furnace

Crucible Furnace

Bogie Hearth Furnace

CVD Furnace System

PECVD Furnace System

Roll-to-roll graphene film growth equipment

LP/AP CVD System

Coating equipment

Vacuum Sintering Furnace

Vacuum Annealing Furnace

Vacuum Brazing Furnace

Vacuum Tempering Furnace

Vacuum Hot Pressing Furnace

Vacuum Gas Quenching Furnace

Vacuum Carbon Tube Furnace

400℃-1200℃

1300℃-1400℃

1500℃-1700℃

Custom Vacuum Furnace

Custom Box Furnace

Custom Tube Furnace

Zirconia Sintering Furnace

Porcelain Press Furnace

Vacuum Porcelain Furnace

Dental Dewaxing Furnace

Vacuum System and Gas Mixing System

Reactors

Induction Furnace

Vacuum Oven

Accessories and Consumables