Furnace Structure
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Single heating zone
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High purity Al2O3 insulation chamber guarantees excellent temperature uniformity.
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Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
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Sliding flange assembly is made of stainless steel.
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Dual quartz tube:100mm Dia. exterior tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around inside the tube surface for CVD reaction
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Heating zone length: 440mm
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Constant temperature heating zone length: 120 (±1°C) @400~1100°C
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Dual heating zone
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High purity Al2O3 insulation chamber ensures excellent temperature uniformity.
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Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
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Max. Temperature: 1200°C and continuous temperature: 1100°C.
Two Heating Zones controlled separately:
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Dual direction sliding rails to ensure the furnace moves smoothly.
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200mm length for each heating zone, 400mm total heating length
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250mm constant temperature zone if the two zones heating at the same temperature
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500oC max temperature difference if place a thermal block in between two-zone
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Power
10 feet power cable with no plug (ask a licensed electrician to do the plug) |
Single heating zone
Power: 208-240VAC, 50/60Hz, single phase, 2.5KW ( 20A Breaker required) |
Dual heating zone
Power: 208-240VAC, 50/60Hz, single phase, 4 KW ( 50A Breaker required) |
Heating Temperature |
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Max. Temperature: 1100°C
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Continuous Temperature: 1000°C
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Heating & Cooling Rate |
Max. heating and cooling rates depend on working temperature..
( You shall calibrate temperature and heating cooling rate at your working condition before use )
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Fused Quartz Tubes |
High purity quartz tube:
Two pairs of vacuum-sealed flanges with water cooling jackets and stainless steel needle valves
Outside tube EQ-QZTube-101D-1400: OD:4"x ID: 3.8" X 55" Length (OD 100 x ID 96 x 1400 mm )
Inside tube EQ-QZTube-80D-1800: OD:3.15: x ID x 2.95" x 70.8" Length (OD 80 x ID 75 x 1800 mm |
Vacuum Flanges |
Using dual-tube for inducing CVD growth on metal foil (wrapped around interior tube surface):
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1-1. Shown below, one pair of SS304 flanges to seal both the outside tube and space between the outside tube and inside the tube (this space is considered as a reaction chamber).
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Left side flange: Barb fitting with needle valve as gas inlet, a digital vacuum gauge with measuring range 10^-4 to 1000 torr, water cooling inlet/outlet included
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Right side flange: Right angle valve with KF25 flange fitting, a vacuum release needle valve, water cooling inlet/outlet included
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1-2. Leave both ends of the inside tube open for gas cooling.
Ultimate vacuum pressure: 10^-2 torr (by mechanical pump)
10^-5 torr (by turbo molecular pump) |
Temperature Controller |
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PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
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Built-in over-temperature alarm and protection allow for operation without any attendant.
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Over-temperature protection and alarm allow for operation without attendant(s).
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+/- 1 ºC temperature accuracy.
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RS485 Communications Port.
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Advanced Temperature Control (Optional)
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MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar.
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You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD.
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Mass Flow Meters & Gas Mixing Station
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4 precision mass flow controller ( MFC) with digital display and adjusting knob are installed on the left bottom case to control gas flow rate:
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4 Gas channels
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MFC 1: Control range from 0~100 SCCM
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MFC 2: Control range from 0~200 SCCM
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MFC 3: Control range from 0~200 SCCM
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MFC 4: Control range from 0~500 SCCM
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Flowing rate accuracy: ±1% FS
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Gas inlet and outlet: 1/4" Swagelok tube connector
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One 80mL gas mixing tank is installed in the bottom case
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Each gas channel has a stainless steel needle valve for easy on/off
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The flow rate is adjustable from the MFC panel
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Vacuum Pump Station and valves
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Optional 1:
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Pfeiffer's High Speed (226L/min) Oilless Dry Vacuum Pump, 10E-3 Torr Limit is installed inside a heavy-duty mobile cart.
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KFD25 adapter and stainless steel pipe are connected between the pump and tube flange with a precision ball valve.
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10E-2 Torr vacuum can be achieved inside the processing tube
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A digital vacuum gauge is installed on the left side flange.
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Optional 2:
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The heavy-duty Double Step Rotary Vane Vacuum Pump with Exhaust Filter & KF-D25 Inlet is installed inside a heavy-duty mobile cart.
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6.7x10-4 mbar vacuum can be achieved inside the processing tube
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A digital vacuum gauge (made in the USA) is installed on the left side flange.
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For vacuum level to 10^-5 torr, please order below mobile turbopump
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Water Cooling Function
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Water cooling on the flange is mainly for cooling down the o-ring inside the flange to ensure the best-sealed chamber at high temperature:
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Water cooling flanges require >= 10L/M water flow.
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You may use tap water as the coolant, but we strongly suggest you use a recirculating water chiller for environmental considerations.
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Optional Parts (building up a single tube furnace) |
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You can build up an 80mm Dia. single tube reaction by ordering extra sealing flanges and install them onto the interior tube:
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Left side flange: Barb fitting with needle valve as gas inlet and 1/4'' feedthrough fitting for the customer to insert a measuring sensor (e.x. an insertable thermocouple for temperature calibration)
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Right side flange: KF25 fitting with mechanical gauge and vacuum release valve
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Dimension |
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Furnace: 550 x 380 x 520mm
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Bottom mobile case x 2: 600 x 600 x 600mm (one for gas mixing station and the other for vacuum pump)
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Shipping |
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Shipping Weight: ~800 lb
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Shipping by freight with three pallets
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The crating fee will be applied
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Warranty |
One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products page) |