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Bell furnace and rotary tube furnace are used in semiconductor industry projects.

Time:2024-11-15

Bell furnace and rotary tube furnace are used in semiconductor industry projects.


Customer: XX Enterprise in Henan, China Used for semiconductor industry projects

Equipment model and name: 
1.KJ-MZ1700-12LX Bell furnace with stirring function
2.KJ-TX1400-S150LK3WQ Automatic loading and unloading-three temperature zone rotary tube furnace

Equipment introduction: 

1.KJ-MZ1700-12LX Bell furnace with stirring function

 
Bell furnace with stirring function

 
The equipment adopts high-quality silicon molybdenum rods for multi-sided heating, air-cooled double-layer furnace structure, and a fan is installed between the furnace shells to quickly increase and decrease the temperature. 


2.KJ-TX1400-S150LK3WQ Automatic loading and unloading-three temperature zone rotary tube furnace

 
Rotary tilt tube furnace
Rotary tilt tube furnace
Rotary tilt tube furnace

 
This tilted rotary tube furnace consists of a heating system, a control system, a feeding system, a receiving system, and an exhaust gas treatment device.

The tilted rotary tube furnace adopts three temperature zones with independent heating control, and a multi-stage program temperature control system for each zone. The touch screen operation can store multiple sintering processes and the sintering data can be recorded and exported.

The furnace body is a double-shell air-cooled structure, and the upper opening type is convenient for cooling and heat dissipation and replacement of furnace tubes, and has a tilting function.
The furnace tube adopts corrosion-resistant high-purity quartz tubes, and the tube is equipped with a lifting plate. The furnace tube has a forward and reverse function and an adjustable speed.
The feeding and receiving materials use a 316L material feeding bin.
The furnace chamber is made of alumina polycrystalline fiber material, high-quality silicon carbon rod heating, circular arrangement of temperature field balance, and an air cooling system between the double-layer furnace shells.


 

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