Graphene cvd high vacuum system_Zhengzhou Kejia Furnace

Graphene cvd high vacuum system

Description：

KJ-OTF-1200-80 is an idea system for graphene growth, it consists of one split tube furnace with 80mm diameter and 300mm long hot zone, one quartz tube or alumina tube is available.

Specific Introduction:
KJ-OTF-1200-80 is an idea system for graphene growth, it consists of one split tube furnace with 80mm diameter and 300mm long hot zone, one quartz tube or alumina tube is available. Its tube chamber could reach a high vacuum degree of 6.7*10-3Pa under cold state, it is also good choice for vacuum sintering. The gas-rout is specialy designed for N2 gas, H2 gas and CH4 gas. User can also choose other gases according to actual processing technology.

Product Information:

Heatings system	Display	Touch screen
	Chamber	Split type
	Max. Temperature	1200℃ for short time
	Continuous Working Temp.	≤1100℃
	Heating Rate	Suggestion: 0~15℃/min (max. 20℃/min)
	Temperature Zone	300mm Customizable
	Constant Heating Zone	150mm Customizable
	Heating Element	Resistance Wire with Mo
	Thermocouple	N type
	Temperature Control Accuracy	±1℃
	Tube Size	80 x 800mm (OD x L) Customizable
	Tube Size	Material: Alumina
	Temperature Control	PID automatic control via SCR power control
	Heating curves	32 steps programmable
	Vacuum gauge	Composite vacuum gage
	Vacuum Flange	Stainless Steel vacuum flange with valves and needles
Vacuu Pump System	Vacuum Pump Group Include KF25, KF50 Adpater,bellow for vacuum pump group and mobile cabinet with wheels.	Ultimate vacuum 6.67*10-3Pa under cold state.
Mass Flow meters(Ar H2 CH4)	Flow scope	(20, 30, 50, 100, 200, 300, 500) SCCM
	Accuracy	±1.5 % F.S.
	Repeat accuracy	±1.5 % F.S.
	Response time	≦10sec
	Working pressure difference range	0.1~0.5MPa
	Pressure resistance	3MPa
	Temperature Coefficient	Zero: ≤±0.2% F.S./℃; Span: ≤±0.2% F.S./℃
	Working environment temperature	5~45℃
	Input signal	0 V ~ +5.00 V
	Output signal	0 V ~ +5.00 V
	Electric plug form	DB15 pin（Female）
	Power	+15 V 50 mA -15V 200 mA