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PECVD for carbon nanotube growth

Time：2025-04-15

　　
Customer: A semiconductor material company in China

Equipment Name: PECVD System

Furnace Tube Material: High-purity Quartz

Atmosphere: Nitrogen

Application: Used for carbon nanotube growth.

Equipment Advantages:

1. Small footprint and powerful functions, integrating heating, radio frequency, precise mass flow meter gas supply, precision gasification, and high vacuum systems.

2. The radio frequency power supply can achieve plasma enhancement, thereby significantly reducing the experimental temperature and reducing the damage to the film caused by high temperature.

3. The stress of the film can be controlled according to the power of the radio frequency power supply.

4. The plasma luminescence can be directly seen with a quartz tube.

5. The whole set of equipment can work in a vacuum/atmosphere protection environment.

6. The touch screen interface is friendly and practical, which can display and monitor the operation status of the equipment, call, edit and store the sintering process, and has dynamic display, historical data can be recorded and exported.

PECVD customer on-site real shot

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