| Product name |
Plasma RF Rotary Tube Furnace System |
| Model |
KJ-TX1100-S50LK1 |
| Chamber material |
The furnace is made of alumina polycrystalline fiber |
| Furnace tube size |
The diameter of both ends is about Φ30mm, the middle size is Φ50mm, and the total length is about 1200mm |
| Heating zone |
200mm |
| Furnace tube material |
quartz tube |
| Working temperature |
≤1000℃ |
| Max. temperature |
1100℃ |
| Heating element |
Alloy heating wire |
| Temperature control accuracy |
±1℃ |
| Heating rate |
0-20℃/min, 10℃/min is recommended, which can be adjusted according to the experimental process |
| Temperature test element |
K-type thermocouple |
| Temperature control system |
Adopt intelligent multi-stage PID programmable control.
The temperature control system adopts artificial intelligence regulation technology, has PID regulation, self-tuning functions and can compile multi-stage temperature rise and fall programs;
1. Use PID method to adjust temperature control, and can set multi-stage temperature rise and fall programs.
2. Temperature control accuracy ±1ºC.
3. Over-temperature protection and broken couple protection. The electric furnace heating circuit is automatically cut off when over-temperature or broken couple is overheated.
4. The instrument has the function of temperature self-tuning. |
| Sealing method |
The sealing method of magnetic fluid and vacuum flange is adopted, and the sealing effect is better |
| Rotation rate |
15rpm/min Adjustable |
| Rotating structure |
Rotation mode, the furnace tube can rotate 360° and the furnace body can be tilted |
| Operating Voltage |
AC 220v 50Hz |
| heating power |
2KW |
| Vacuum system |
1. Use DRV-10 rotary vane vacuum pump, the cold limit vacuum can reach 10Pa, the vacuum pump contains a dust filter.
2. KF quick connection, stainless steel bellows, manual baffle valve and flange, vacuum pump connected;
3. Digital vacuum gauge display. |
| Plasma power system |
Power range 0-500W (continuously adjustable)
Operating frequency 13.56MHZ+0.005%
Operating mode Continuous output
RF output impedance interface N-type, female (50Ω)
Power stability ≤2W
Maximum reflected power 70W
Power protection settings DC overcurrent protection, amplifier overtemperature protection, reflected power protection
Supply voltage/frequency Single-phase AC (187V-253V) 50-60HZ
Cooling method Air cooling |
| Provide related accessories |
Lifetime warranty for crucible hook, high temperature gloves, thermocouple, custom furnace plug, instruction manual, warranty card, etc. |
| After-sales service |
12-month warranty, lifetime warranty (heating elements, furnace tubes and other accessories provided with the product are not covered by the warranty). |
| Precautions |
The gas pressure in the furnace tube cannot be higher than 0.02MPa.
· Due to the high gas pressure inside the gas cylinder, a pressure reducing valve must be installed on the gas cylinder when the gas is introduced into the furnace tube, which will be more accurate and safe when used.
· When the furnace body temperature is higher than 1000℃, the furnace tube cannot be in a vacuum state, and the gas pressure in the furnace tube must be equivalent to the atmospheric pressure and maintained at normal pressure.
· The gas flow entering the furnace tube must be less than 200SCCM to avoid the impact of cold air flow on the heated quartz tube.
· The long-term use temperature of the quartz tube is less than 1100℃.
Corrosive gases such as chlorides and sulfides must not be introduced, which may easily cause damage to stainless steel parts such as flanges.
For the experiment of sample heating.
It is not recommended to close the exhaust valve and the air inlet valve at the flange end of the furnace tube.
If you need to close the gas valve to heat the sample, you need to pay attention to the indication of the pressure gauge at all times
If the pressure indication is greater than 0.02MPa, you must immediately open the vent valve to prevent accidents (such as furnace tube rupture, flange flying out, etc.) |
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