1200℃ Max Two-Zone PECVD Tube Furnace (50 mm OD) with Pre-Heater and Auto-Sliding

Description：

KJ-1200X-II-50 is a dual-zone PE-CVD tube furnace system which consists of 300W RF plasma source, speed controlled slidable mechanism, a pre-heater for sublimating the solid material and a high-quality oil-less vacuum pump. Such a PE-CVD furnace is a new

Specific Introduction:
KJ-1200X-II-50 is a dual-zone PE-CVD tube furnace system which consists of 300W RF plasma source, speed controlled slidable mechanism, a pre-heater for sublimating the solid material and a high-quality oil-less vacuum pump. Such a PE-CVD furnace is a new tool to grow nanowire and for CVD coating of a wide range of material with the following benefits:

Lower temperature processing is required compared to the conventional CVD
High heating & cooling rate using a sliding furnace
Dual heating zone to create a thermal gradient up to 500ºC
1100ºC Max. the working temperature in the tube furnace
1100ºC Max. the working temperature in pre-heater for heating vapor phase or evaporating solid materials
Rapid cooling & Heating for growing 2D materials

Parameters:

Dual Zone Split Tube furnace	Max 1100ºC for continuous heating. Two programmable precision digital temperature controllers with 30 segments. Two separate controlled Heating Zones. 200mm length for each heating zone. 400mm total in heating length. 250mm constant central temperature heating area if both zones were heated at the same temperature. 500ºC max temperature difference between two zones with thermal blocks in between.
Plasma RF Power Supply	Matching: Automatic RF Output Port: 50 Ω, N-type, female Noise: <50 dB. Cooling: Air cooling.
Pre-heating furnace	Small tube furnace with 200mm length single heating zone Max. temperature: ≤ 1100ºC 30 segment programmable temperature control The vapor goes through the heater first before getting in the RF Plasma generator. It can put solid material in the heater for evaporation and mixing with the vapor phase. Quartz Tube: 50mm OD x 44mm ID x 2200 mm L ( 80mm OD tube is available at extra cost） Vacuum flange: included
Anti-corrosive Pressure Gauge	3.8x10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection Fast atmospheric detection eliminates waiting time and shortens process cycle Easy to exchange plug & play sensor element
Oil-less Vacuum Pump Station and Valves	Pfeiffer's High Speed ( 226L/min) Oil-less Dry Vacuum Pump, 10E-3 Torr Limit is installed inside the heavy-duty mobile cart KF25 adapter and stainless steel pipe are connected between the pump and tube flange with precision ball valve for customer's plug and play 10E-2 Torr vacuum can be achieved inside the processing tube
Sliding mechanism	Sliding rail and screw are built in the bottom furnace, which can move from one side to another as a program to achieve faster heating or cooling. Sliding speed is adjustable from 0-70 mm/s
Heating & Cooling Rates	RS485 port and software are installed and allow remote control temperature profile by PC (not included, customer can order one from here) In order to achieve Max.heating rate, the user must preheat furnace to the desired temperature, then slide the furnace to the sample zone of the tube In order to achieve the Max. cooling rate, push the heated furnace from hot zone to cold zone
Optional	Two - Four precision mass flow meters (0.02% accuracy) with digital displays are available as options, which can replace the bottom case to control the gas flow rate automatically with the system.
Warranty	One year limited warranty with lifetime support