ALD PECVD System_Zhengzhou Kejia Furnace

ALD PECVD System

Model：KJ-PECVD

Description：

ALD PECVD System is a tube furnace with 80mm diameter alumina tube, vacuum pump and six channels mass flow meters gas flowing system. It can mix 1-6 types of gases for PECVD or diffusion.

Brief Introduction:
It is a tube furnace with 80mm diameter alumina tube, vacuum pump and six channels mass flow meters gas flowing system. It can mix 1-6 types of gases for PECVD or diffusion.

Technical Parameter:

Model		KJ-PECVD
Part I: Standard Parts
Tube Furnace	Display	LCD Touch Screen
	Continuous Woking Temp.	≤1100℃ for 1st zone ≤1100℃ for 2nd zone ≤1600℃ for 3rd zone
	Heating Rate	Suggestion: 0~10℃/min
	Temperature Zone	220mm+220+220mm
	Heating Element	Sic heater and MoSi2 heaters
	Thermocouple	K type and B type
	Temperature Control Accuracy	±1℃
	Tube Size	80x1600mm (OD x minimum L) Approx.
	Tube Size	Material: alumina
	Temperature Control	PID automatic control via SCR power control
	Tilt function	0-15 degree (it is not suggested to work in tilt function at 1100C, since the MoSi2 heating element may broken easily. It will become soft at high temperature, pls be kindly noted.)
	Heating curves	30 steps programmable
	Vacuum Flange	Stainless Steel vacuum flange with valve Right side flange is sliding type. And the flange will be water cooling type.
	Power	220V, 50 Hz, single phase at max. 8KW
supply Plasma RF Power	Power Range	0-300W（continuous adjustable）
	Control Mode	Manual / PLC / PC232/485
	Working Frequency	13.56MHz
	Machine Protection	DC overload protection, DC/amplifier over-temperature protection, reflected power protection, matching timeout protection
	RF Output Impedance Interface (50Ω)	N-type, female
	Power Stability	≤ 1 W
	Maximum Reflected Power	200 W
	Harmonic Components ≤ d Bc	-50
	Supply Voltage	187V - 253V
	Overall Efficiency ≧ %	70
	Cooling Method	forced air cooling
Vacuum Pump	Molecular Pump System	Ultimate vacuum:6.7*10^-5Torr. Include digital vacuum gauge
Mass Flow Meters (LCD Touch Screen)	Six precision mass flow meters : MFC Accuracy is: ±1.5% F.S. MFC 1 for Ar : Gas flow range depends on customer’s requirement MFC 2 for N2 : Gas flow range depends on customer’s requirement MFC 3 for O2 : Gas flow range depends on customer’s requirement MFC 4 for C2H2: Gas flow range depends on customer’s requirement MFC 5 for CH4: Gas flow range depends on customer’s requirement MFC 6 for H2: Gas flow range depends on customer’s requirement (above flow range is only for reference, Pls confirm gas flow range before palce order. ) One gas mixing tank is installed on bottom case with 6 stainless steel needle valves is installed on left side of bottom case to control 6 type gases mixing manually. LCD Touch Screen (designed by kejia, with Kejia Logo) for MFC is as below:
(this valve is not supplied by us)ALD valve	Two ALD valves with pulse controller (min 10 ms duration ) And connect to touch screen
Liquid-Vapor Generator	Automatic liquid vapor generator is included and connect to ALD valve
1.7MHZ ultrasonic Atomization	Equipped with a 1.7MHz ultrasonic atomizer, the liquid can be atomized into liquid particles and introduced into a tube furnace. 20VAC, 1.7MHz ultrasonic atomizer • The liquid tank comes standard with 316 stainless steel,and sealed with a fluorine rubber seal; • Atomization amount can be set from 1 to 8, and the amount of atomization can be controlled by adjusting the size of the gear; • It can realize two functions of continuous operation atomization and regular operation atomization. The timing can be adjusted from 30 minutes to 180 minutes (adjust the gear every 30 minutes).
Liquid injection system	• A standard set of liquid injection pumps for automatic liquid feeding • The syringe pump is equipped with a plastic syringe with a maximum volume of 60ml for holding liquids; • Syringe pump speed adjustment range: 0.004ml / min—70ml / min
Water Chiller	Used to cool down water cooled flange and vacuum pump.

Pls note: C2H2 CH4 and H2 are flammable gas,suggest customer to operate system in ventilation environment,and it is better to prepare gas alarm equipment at customer side.