Chemical vapor deposition system_Zhengzhou Kejia Furnace

Chemical vapor deposition system

Model：

Description：

The main technical parameters:
Product name Chemical vapor deposition system Model KJ-TCVD1200-S80LK1 High temperature tube furnace

The main technical parameters:

Product name	Chemical vapor deposition system
Model	KJ-TCVD1200-S80LK1
High temperature tube furnace
Hearth mode	open type
display mode	LED
Chamber material	Alumina refractory fiber
Heating element	Alloy heating wire
Max.temperature	1200℃
Working temperature	≤1100℃
Heating rate	0-10℃/min
Heating zone	Single zone
Temperature zone length	440mm
Furnace tube material	High purity quartz
Furnace tube outer diameter	80mm
The length of the furnace tube is approx.	1000mm（Subject to actual supply）
Sealing method	Removable stainless steel sealing flange. Easy to disassemble and assemble, good sealing
control mode	Intelligent PID control with multi-stage programmable temperature control and self-tuning function
Temperature curve	Multiple "time-temperature curves" can be set arbitrarily
Call the police	With overtemperature and disconnection alarm
Temperature measuring element	K type thermocouple
Power supply	220V 50Hz
Heating power approx.	4KW
Air supply system
flow meter	Three-way mass flow meter (range can be selected according to needs)
A way range nitrogen	0～1000SCCM
B road range methane	0～500SCCM
C Road Range Ethylene	0～500SCCM
Mixed air	Contains a precision air mixing tank
Power supply	220V 50HZ
Working temperature	5℃-45℃
Vacuum system (including stainless steel bellows and related connection accessories)
Vacuum pump pumping speed	2L/S pumping speed mechanical rotary vane pump, bellows and related connectors, ultimate vacuum can achieve 10pa
Digital vacuum gauge	Digital resistance vacuum gauge integrated into the movable air supply system box
Regulation of use	resistance gauge
Measuring range	1.0×105—1.0×10-1 (Pa)
measurement accuracy	±10%
zero drift	±2%
Number of measurement channels	1 channel
Display the number of channels	1 window
Display method	Five-digit LED digital display, using scientific notation, for example: 1.2E-1, expressed as 1.2×10-1Pa
power supply	AC/220V/50Hz/15W
The overall dimensions of the whole machine are approx.	Including vacuum pump, width 1000depth 600mmheight 1000mm
After-sales service	●Warranty period: 15 months after leaving the factory or 12 months after acceptance, whichever comes first (excluding consumable parts such as silicon molybdenum rods, silicon carbon rods, resistance wires and man-made damage), lifetime warranty, free technical guidance on installation and Equipment debugging services. When the warranty expires, renewal services will be provided. ● General faults will be resolved within 24 hours, and major faults will be resolved within 72 hours. In special circumstances, technicians can go to the site to deal with the problem.