Tel Number
180-3717-8440
Company Statement" Zhengzhou KJ Technology Co., Ltd. " belongs to the international business department of KJ Group. Starting today, the company will continue the international business contract signed or currently being performed by " Zhengzhou Kejia Furnace Co., Ltd. " See details >>



Description:
In the fields of semiconductor manufacturing, automotive industry, general machinery, digital products, light-emitting diodes, etc., they provide these products with better wear resistance, corrosion resistance and other properties.


Precision temperature control: Adopting multi-stage program temperature control (such as 30-stage curve) and corundum furnace, the temperature field uniformity is high (such as ±0.5°C/24h), and the heating rate is fast.

Multi-gas path design: integrated 2-5 gas mixing system, supporting float/mass spectrometer flowmeter to accurately control the reaction gas ratio.

High efficiency vacuum: the ultimate vacuum reaches 10⁻³Pa, reducing impurity interference and improving carbon tube purity.

Energy saving and consumption reduction: The third-generation horizontal furnace has lower energy consumption than the traditional tube furnace, the constant temperature time is shortened by 50% (45-60 minutes), and the purity after pickling is >98%.
| Tube Furnace Part | |
| Product model | KJ-TCVD1200 |
| Maximum temperature | 1200℃ |
| Working temperature | ≦1100℃ |
| Heating zone | 200mm Customizable |
| Heating element | Molybdenum alloy resistance wire |
| Heating rate | 0-20ºC/min, 10C/min recommended |
| Tube size | Diameter 50*600mm Customizable |
| Tube material | High-purity quartz tube |
| Tube plugging | Metal screen on the left, detachable |
| Temperature control system | 7-inch touch screen control |
| Temperature control protection | With over-temperature and broken couple protection function |
| Temperature measuring element | N-type thermocouple |
| Temperature control accuracy | ±1℃ |
| Furnace material | Polycrystalline fiber material |
| Flange | Stainless steel sealed water-cooled flange, quartz lens on the right flange end |
| Sealing system | O-ring extrusion seal is used between the furnace tube and the flange; |
| Dynamic seal is used between the rotating motor and the flange | |
| Furnace structure | Outer shell is made of stainless steel, double-layer liner structure, and the furnace door is opened manually |
| Furnace shell temperature | ≤55℃ |
| Rotation System | |
| Speed | 200r/min |
| Connection method | Coupling connection with shaft dynamic seal transmission |
| Vacuum System | |
| Name | DRV10 rotary vane pump 2L/S |
| Main parameters | Ultimate vacuum ≤10Pa |
| Vacuum gauge | Resistance gauge + film gauge |
| Pressure control | Working pressure 0.04-0.06Mpa |
| Filter | Vacuum pump equipped with special filter device |
| Pressure gauge | Mechanical pressure gauge |
| Gas System | |
| Air path | One nitrogen |
| Flow control | Touch screen display |
| Flow range | 500SCCM |
| Control accuracy | ±1.5%F.S |
| Inlet interface | 1 manual valve + 1 solenoid valve |
| Exhaust interface | 1 manual valve |

Rotary Tube Pyrolysis Furnace - For Engineering Plastic Pyrolysis

Pilot-scale rotary kilns have helped US customers innovate in new energy, enabling them to successfu

Malaysian customers came to our factory to inspect the magnetron sputtering coating equipment

PECVD for carbon nanotube growth

Research group of Tsinghua University in China visited the factory

Professional Process, Effortless Purchase
Click to inquire
E-mail:web@kejiafurnace.com
Tell:+(86) 18037178440
Whatapp:+(86) 180-3717-8440
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
web@kejiafurnace.com
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