Customized fluidized bed CVD system_Zhengzhou Kejia Furnace

Customized fluidized bed CVD system

Model：KJ-CVD-DZ

Description：

Mainly used in the research of chemical vapor deposition preparation process of ultra-high melting point coatings such as materials and composite carbides.

Product introduction:
The system uses silicon carbide rods as heating elements, adopts a double-layer shell structure and a 30-segment program temperature control instrument, phase-shifting trigger, SCR control, the furnace is made of alumina polycrystalline fiber material, and the two ends of the furnace tube are used The stainless steel flange is sealed. The stainless steel flange is equipped with gas nozzles, valves, pressure gauges, and vacuum pump interfaces. It has the advantages of balanced temperature field, low surface temperature, fast temperature rise and fall, and energy saving.

Structural composition:
customized fluidized bed CVD system, composed of vacuum vertical tube furnace, gas supply system, vacuum system, and vacuum measurement system.

Technical parameter:

product name	Customized fluidized bed CVD system
Product number	KJ-CVD-DZ
Vertical tube furnace
Furnace mode	Vertical open type
Furnace material	Imported alumina refractory fiber
Heating element	High quality silicon carbide rod
Limit temperature	1400°C
Operating temperature	≤1300℃
Heating rate	≤20℃ (recommendation: 15℃/min)
Heating temperature zone	Single temperature zone, multiple temperature zone
Total length of temperature zone	200, 300, 440
Furnace tube material	High purity quartz tube, corundum tube
Tube diameter	40, 50, 60, 80, 100mm...
Sealing method	A set of 304 stainless steel vacuum flange (including sealing silicone ring)
Control mode	Multi-segment intelligent PID program temperature control, reserved communication interface
Temperature control accuracy	±1℃
Temperature curve	Multi-segment "time-temperature curve" can be set arbitrarily
Temperature measuring element	K-type thermocouple
Pneumatic system
Operating Voltage	220V/50HZ
Maximum output power	18W
Operating temperature	5--45℃
Gas channel	Multiple air sources can be connected at the same time
Flowmeter	Mass flowmeter
Range A	0～500SCCM
Range B	0～500SCCM
C-channel range	0～500SCCM
.....	.....
Air pressure	-0.1～0.15 MPa
Shut-off valve	Stainless steel material
Gas connection pipe	1/4 stainless steel tube
Digital display vacuum gauge and connecting parts
Digital display vacuum gauge	Digital display vacuum gauge installed on stainless steel flange
Vacuum pump set (related connection accessories)
Vacuum pump	Vacuum pump and corresponding connecting pipe 220V/50HZ
After-sales service	One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty)