Three Zones Tube Furnace (4＂) with Vacuum Pump (1.0E-4 torr) + 9 Channel Digital Gas Flow-meters for

Description：

KJ-1200X-4-III is CE certified 4" diameter split three-zone tube furnace with vacuum pump system (up to 10-4 torr) and 9 channel PLC Touch Panel precision digital Mass flow meters Gas Control System, which can control nine types of gases for CVD or diffu

Specific Introduction:
KJ-1200X-4-III is CE certified 4" diameter split three-zone tube furnace with vacuum pump system (up to 10-4 torr) and 9 channel PLC Touch Panel precision digital Mass flow meters Gas Control System, which can control nine types of gases for CVD or diffusion.
Parameters:

Furnace	Structure	Double-layer steel casing with air cooling. High purity alumina fiberboard liner for energy cost-effective operation. Three heating zones with three independent temperature controllers. Vacuum and gas mixing system are located in the bottom Mobile cart with 4 wheels.
	Heating Element	Fe-Cr-Al Alloy doped by Mo
	Max. Heating Temp.	1200°C
	Continuous Heating Temp.	1100°C
	Max. Heating Rate	≤20°C/min
	Heating Zone Length	Three zones: (880mm, 35" in total) Zone 1: 220 mm + Zone 2: 440 mm + Zone 3: 220 mm
	Constant Temp. Zone	20" (500 mm) length (three zones at equal temperature within ± 1°C)
	Tube Size and Materials	Fused Quartz Tube 100 mm O.D x 92 mm ID. x 1400 mm
	Temp. Controller	Three programmable precision digital temperature controllers with 30 segments, which control each heating zone separately. PID adjustable with auto tune function to ensure temperature stability within +/ - 1 oC. Full protection in each controller for over-temperature and broken thermal couple.
	Thermocouple	Three N-type thermocouples
Vacuum Fittings	The Standard vacuum accessories include: Two stainless steel vacuum flanges with KF-25 pump connector, two needle valve and one 1/4" Swagelok tube connector. Six pieces of high-temperature silicone O-ring for using under 300°C. Two pairs of alumina thermo-blocks are included for protecting flange from heat radiation. One KF-40 vacuum bellows Three KF-40 quick clamps. Two KF-25 quick clamps.
HV Station High Vacuum Station	Structure	Mobile cart size: 600 (L) x 600 (W) x 700(H), mm Max. Loading: 600 Lbs on top Molecular pump control Panel: LCD digital Inside: Pfeiffer vacuum pump Vacuum sensor is included
	Vacuum sensor	The vacuum sensor has a KF-25 connector. High vacuum gauge (measuring range 10^-8 mbar ~ 10^3 mbar)
	Control Panel	One button operation - the diaphragm pump and the turbomolecular pump will start after pressing the "start" button. System controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber. Self-protection - the system will protect the pump from damage by overheating and overcurrent if the leaking rate of the reaction chamber is too high to achieve the high vacuum. LCD screen - double lines parameters checking interface make the working easier to be handled.
	Volume Flow Rate	Nitrogen N2 33 L/s Helium He 39 L/s (2340L/minute) Hydrogen H2 32 L/s
	Working Range	From 1000 mbar to <1E-7 mbar
	Ultimate Pressure	10^-5 torr (with tube furnace)
MFC Station Mass Flow Controller	9 precision mass flow meters controllers are installed in the bottom mobile cart with the digital display panel of +/-1.5% of Full Scale. Controller 1: 0~100 SCCM Controller 2: 1~199 SCCM Controller 3: 1~199 SCCM Controller 4: 1~499 SCCM Controller 5-9: measuring range can be customized upon request
Gas Pipe Connect	One 1/4“ Swagelok tube connect is installed in the left flange as the gas inlet. Each MFC Station has four 1/4" Swagelok tube connects. And four on/off valves for each gas route. The fifth one is used as the gas outlet. The 1/4" PTFE gas pipe is included in the standard package. [Optional] If a Stainless steel 1/4" gas tube is needed, please contact us to order.