Graphene-Growing CVD System_Zhengzhou Kejia Furnace

Graphene-Growing CVD System

Model：KJ-1200-S6014LK1-H

Description：

KJ-1200-S6014LK1-H CVD System consists of a tube furnace, a three-channel gas-mixing unit with mass flow meters, a vacuum pump unit.

Range of Application:
This CVD system is specially designed for graphene growth and also for other CVD experiments which require fast heating and cooling. The hot furnace chamber can be pushed directly to the cold side to fast-heat the samples and also the opposite way for fast cooling.

Parameters:

Product name	Graphene-Growing CVD System
Model	KJ-1200-S6014LK1-H
Tube Furnace	Type	Slide-type
	Insulation layer	Alumina ceramic fiber
	Max. Temperature	1200℃
	Working Temperature	≤1100℃
	Outside Shell Temperature	≤45℃
	Heating Rate	20℃/min (Suggestion 10℃/min)
	Heating Zone Length	300mm (Single Zone)
	Heating Element	0Cr27Al7Mo2 resistance wire
	Temperature Sensor	K-type thermocouple
	Temperature Control Accuracy	±1℃
	Tube	Quartz tube Φ50, 60, 80, 100, 150mm available.
	Temperature Controller	PID automatic control with 30 programmable segments for precise control
	Sealing	Flanges made of 304SS and silicon rubber rings Gas valve on left flange Vacuum angle valve with KF25 connector on the right flange Note: Standard flange, KF flange and hinge flange are available.
	Power Supply	Single phase, 220V, 50Hz.
	Power	Power 3kW
Vacuum pump unit	Vacuum pump (With movable box)	10pa with a mechanical vacuum pump 0.001pa with a mechanical vacuum pump and a diffusion vacuum pump.
	Pressure Gauge	Inficon Digital Pressure Gauge with high accuracy Measurement Range 1×105--1×10-5Pa
Gas-Mixing Unit with mass flow meters	Three precise mass flow meters (0.02% accuracy) are installed to control gas flow rate with touchscreen control for easy operation. One gas mixing tank is installed on the bottom case. MFC 1: Gas flow range from 0~100 SCCM MFC 2: Control range from 0~200 SCCM MFC 3: Control range from 0~500 SCCM Gas inlet fitting: four 1/4NPS. Gas outlet fitting: four 1/4NPS. Power: 185-220VAC 50/60Hz 4 stainless steel needle valves are installed on the left side to manually control the inlet and outlet of gas.
Chiller (Optional)	Be used to cool the tube and vacuum pump.
Notes	Pressure higher than 1.02Mpa will break the tube. Since the pressure in the gas cylinder is high, a converter is necessary. The measurement range of our converter is 0.01mpa-0.1mpa, will ensure a safe gas supply. No vacuum condition is allowed when the temperature is higher than 1000℃. Please keep the gas flow lower than 200sccm when the temperature is high to lower the impact of cold air to the hot tube. If you have to keep the valves on the two ends of the tube closed at the same time, please watch the pressure gauge and open the valves once the pressure is higher than 1.02Mpa to avoid any tube breakage.
Warranty	One year with lifetime technical support.