Tel Number
180-3717-8440
Model:KJ-T1000-FD
Description:
This three-temperature zone rotating cvd system has 3 heating zones to improve temperature uniformity, and is equipped with a 3-channel precision mixing system. The furnace body is open-type design, which is convenient for operation and rapid cooling of s
product name | Three temperature zone rotating CVD system |
spinning speed | 0-15rpm/min adjustable |
slope | One side tilt: 0-15 degrees adjustable |
Vacuum | Rotary vane pump and related connecting parts are optional, and the vacuum degree can be -0.1MPA |
Precision mixing system | Three-channel mass flow meter A road: 0-500sccm B road: 0-500sccm C road: 0-500sccm |
Maximum temperature | 1000 °C |
Operating temperature | 1000℃ and below |
Length of heating zone | 600mm |
temperature control | 30-segment PID automatic control, touch screen can store multiple processes, can realize data recording and copy |
Heating rate | 0~10 ℃/min adjustable |
Furnace tube material | stainless steel pipe |
Furnace tube size | Inner diameter: 200mm*length 1200mm |
Highest power | Subject to actual needs |
More specifications can be customized according to requirements |
Tel Number
180-3717-8440
web@kejiafurnace.com
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