High Temperature CVD Tube Furnace System

Description：

High vacuum 1600 ℃ vacuum tube furnace, with the possibility of working under atmospheres and under vacuum using inert gases, this furnace is mainly used for the recovery of gases from calcina

Brief Introduction:
KJ-T1600-L10030-LC4 is a compact tube furnace system, which consists OD100 single-zone tube furnace, 4 channels precision mass flow meter with gas mixing tank, and rotary vane vacuum pump system.

Technical Parameter:

Model		KJ-T1600-L10030-LC4
Part I: Tube Furnace
Tube Furnace	Display	7’’ Touch screen
	Furnace Structure	Split type and upper part can be opened. Double layer steel casing with air cooling to keep furnace surface temperature lower than 60°C. High purity fibrous alumina insulation for Max. energy saving.
	Max. Temperature	1600℃ for short time
	Continuous Woking Temp.	≤1500℃
	Heating Rate	Suggestion: 0~10℃/min (max. 20℃/min)
	Temperature Zone	Double zones 220+220mm
	Heating Element	MoSi2 rods
	Thermocouple	B type
	Temperature Control Accuracy	±1℃
	Processing Tube	OD80 x 1000mm (OD x L)
	Processing Tube	Material: High pure Alumina
	Flanges	Flanges made of 304SS Gas valve and pressure gauge on left flange Vacuum angle valve with KF25 connector on the right flange
		Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating).
	Temperature Controller	-Two temperature controllers control the heating zones separately. -PID automatic control via SCR (Silicon Controlled Rectifier) power control -30 programmable segments for precise control of heating rate. -Built-in over temperature alarm and protection allows for operation without an attendant. -Furnace with R&S485 communications port and software, which can control on the computer
	Power	220V, 50 Hz, single- phase(or according to your requirement) max.8KW
Part II: 4 Channels Mass Flow Meter and Controllers
Gas Mass Flow Meter (touch screen is optional)	4 precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2: Gas flow range from 0~500 sccm MFC 3: Gas flow range from 0~500 sccm MFC 4: Gas flow range from 0~1000 sccm Please inform us the gas type and measuring range before place order. Flowing rate accuracy: ±1% FS One gas mixing tank is installed on bottom case with liquid release valve 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually
Part III: Vacuum Pump system
Vacuum Pump System	Rotary Vane Vacuum Pump Include KF25 Adpater, bellow for vacuum pump and cart with wheel Ultimate vacuum 10-3 Torr. And vacuum inside the tube is around 10-1 Torr. Flow rate: 2.2L/S
Part IV: Water cooling system
Water chiller	Water cooling on the flange is mainly for cooling down the o-ring inside the flange to ensure the best-sealed chamber at high temperature: Water cooling flanges require >= 10L/M water flow.