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Whatapp:
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
Brief Introduction:
KJ-T1400-4CVD is a compact CVD (Chemical Vapor Deposition) tube furnace system, which consists 60O.D tube furnace, 4 channels precision mass flow meter with gas mixing tank, and Agilent Brand imported turbomolecular pump system.
Technical Parameter:
KJ-T1400-4CVD is a compact CVD (Chemical Vapor Deposition) tube furnace system, which consists 60O.D tube furnace, 4 channels precision mass flow meter with gas mixing tank, and Agilent Brand imported turbomolecular pump system.
Technical Parameter:
| Model | KJ-T1400-4CVD | |||
| Part I: Single Zone Sliding Type Tube Furnace | ||||
| Tube Furnace (The furmace will be sliding type) |
Display | LED | ||
| Furnace Structure | Split type and upper part can be opened. Double layer steel casing with air cooling to keep furnace surface temperature lower than 60°C. High purity fibrous alumina insulation for Max. energy saving. |
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| Max. Temperature | 1400℃ for short time | |||
| Continuous Working Temp. | ≤1300℃ | |||
| Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min) | |||
| Temperature Zone | 300mm single zone | |||
| Heating Element | SiC rods | |||
| Thermocouple | N type | |||
| Temperature Control Accuracy | ±1℃ | |||
| Processing Tube Customizable |
60 x 1200mm (OD x L) | |||
| Material: High pure Quartz | ||||
| Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating). | ||||
| Temperature Controller | -PID automatic control via SCR (Silicon Controlled Rectifier) power control -30 programmable segments for precise control of heating rate, cooling rate and dwell time. -Built-in over temperature alarm and protection allows for operation without an attendant. - ± 1 ºC temperature control accuracy. |
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| Part II:Water Cooling System | ||||
| Water cooled flange + water chiller (Below photo is only for reference, please only reference water cooling part) |
Water cooled Vacuum Flange | Water Cooled Sealing flange with valve and Mechanical vacuum gauge. Made of Stainless Steel with double high temperature silicon O-rings on the flange. Stainless steel needle valve with 1/4" pipe adapter. Mechanical vacuum gauge is installed in one side of flange. Water Cool System is an ideal tool for supplying cooling water to this flange set. |
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| Water Chiller |  Max. Flow rate 10L/min |
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| Part III: 4 Channels Mass Flow Meter and Controllers | ||||
| Mass Flow Meter (touch screen for option need extra cost) |
Four precision mass flow meters : MFC 1: Gas flow range from 0~500 sccm Ar MFC 2: Gas flow range from 0~5 sccm 02 MFC 3: Gas flow range from 0~20 sccm CH4 MFC 4: Gas flow range from 0~100 sccm H2 One gas mixing tank is installed on bottom case with liquid release valve 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually. |
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| Part IV: Turbomolecular Pump System | |
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| Forepump model | WXG-4B |
| Displacement Speed | 4L/S |
| Ultimate pressure(Pa) | ≤1.5 |
| Scroll pump leakage rate | 1×10-6 Pa.m3/S，special gas can be 1×10-8Pa.m3/S |
| Water vapor handling capacity | 25g/day |
| Rotational Speed of pump(50HZ) | 1450rpm |
| Inlet flange | KF25 |
| Outlet flange | KF25 |
| Turbomolecular model | FJ-110 |
| Turbo pump speed | 110L/S |
| Inlet flange | DN100CF |
| Compression Ratio | N2:＞108, H2:5x102 |
| Ultimate vacuum (Pa) | 6x10-7Pa |
| Suggest run vacuum(Pa) | ＜100 |
| Cooling method | Air /water |
| Weight(kg) | 52 |
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Other slide-type tubular vapor deposition systems：
