CVD coating system for semiconductor industry

Description：

The CVD system uses a gaseous compound or a mixture of compounds to undergo a chemical reaction on the heating surface of the substrate. It is a film material preparation system that generates a non-volatile coating on the surface of the substrate , which

1. Introduction
The CVD system uses a gaseous compound or a mixture of compounds to undergo a chemical reaction on the heating surface of the substrate. It is a film material preparation system that generates a non-volatile coating on the surface of the substrate , which consists of a vacuum tube furnace, a multi-channel gas mixing system and a vacuum system. It is suitable for CVD process, such as silicon carbide coating, ceramic substrate Sheet conductivity test, controllable growth of ZnO nanostructure, ceramic capacitor (MLC C ) atmosphere sintering and other experiments.
The CVD vacuum system can be equipped with molecular pump system or rotary vane pump system, the highest vacuum degree can reach 10*-3pa, The multi-channel gas source mixing system can be equipped with a float flowmeter or a mass flowmeter, which has a large range and high control accuracy; There are also a variety of functions that can be customized according to customer requirements.

2. Main functions and features
1) Professional heating elements are used, and the furnace insulation material is made of polycrystalline fiber material, which has good thermal insulation performance and is durable. It has high tensile strength, no miscellaneous balls, high purity, and the energy-saving effect is obviously better than that of domestic fiber materials.
2) The entire furnace body adopts a double-layer liner structure with air gap isolation in the middle. Even if the furnace temperature reaches the highest point, the surface of the furnace body can still be safely touched without feeling hot.
3) The furnace is made of energy-saving materials, and the energy consumption of the whole machine is only 1/3 of that of the same traditional electric furnace, which is energy-saving and environmentally friendly.
4) The furnace body is equipped with : output voltage and output current monitoring meter, the heating status of the furnace is clear at a glance.

5) Over-temperature alarm and power off, leakage protection, safe and reliable operation with multiple protection functions.
6) The CVD system consists of: heating furnace system, gas mixing station system, vacuum system and pressure control system.

3. Technical Parameters

Product name		CVD Chemical Vapor Deposition System
Product model		KJ-TCVD1100-S60CK1
Heating Furnace system
Slide rail	With sliding rail to achieve rapid heating or cooling
Heating zone	400mm Customizable
Tube size	60 mm x1400mm outer diameter x length Customizable
Tube material	High purity quartz tube
Working temperature	≤ 1100°C
Temperature control	Intelligent 30-segment PID microcomputer programmable automatic control
Temperature control accuracy	±1℃ ( with over-temperature and Thermocouple-broken alarm function)
heating rate	Suggest 0~10℃/ min
heating element	Resistance wire
Permeable gas	gases such as nitrogen and argon
Temperature measuring element	Thermocouple temperature measurement
Shell structure	Double shell structure with air cooling system
Vacuum flange	Flange end with 1/4" tube fitting inlet, 60 mm flange.
Gas mixing station system
Mass Flowmeter	Four-way precision MFC flowmeter: Measurement accuracy: ±1.5% FS Flow range: : 0~200 sccm (based on customer’s requirement ) Flow range: : 0~200 sccm (based on customer’s requirement ) Flow range: : 0~2 00 sccm (based on customer’s requirement) Flow range: : 0~500 sccm (based on customer’s requirement ) Adjust gas flow via touch screen

Vacuum System
Vacuum system	Rotary vane pump, the vacuum degree can reach 1pa in the cold state of the empty furnace, Vacuum gauge: Imported digital display vacuum gauge displays vacuum degree in real time with high precision.
Pressure Control System
Control Range	Overall controllable pressure range -20kpa to 20kpa (relative pressure) Or based on your requirement.
Others
Automation control 1 5 ” touch screen	Touch screen interface integrated control furnace, vacuum pump, mass flow meter and pressure control system . The furnace part needs to set up the temperature time curve first. The integrated control section can control Start and stop of temperature curve, vacuum degree, gas flow, pressure relief valve, etc.