English
简体中文
Русский язык
Français
日本語
한국어
Português
Español
Website navigation
Position:
Leave A Message
E-mail:
Tell:
Whatapp:
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
Introduction
The system consists of heating furnace,3 channels MFC,vacuum unit,RF generator,cooling device,Sealing device for collecting and releasing copper foil and automatic control system.The unwinding roller and the winding roller are respectively installed in the sealing device for collecting and releasing copper foil, and a cooling device is installed between the output material exhaust cavity and the furnace body.
1.Heating furnace
2、PE system
3、Three-way proton flow control system
4、Low vacuum unit
The system consists of heating furnace,3 channels MFC,vacuum unit,RF generator,cooling device,Sealing device for collecting and releasing copper foil and automatic control system.The unwinding roller and the winding roller are respectively installed in the sealing device for collecting and releasing copper foil, and a cooling device is installed between the output material exhaust cavity and the furnace body.
1.Heating furnace
| Max. Temp | 1200℃ |
| working temp | ≤1100℃ |
| tube zie | Φ80mm |
| insulation material | Alumina, high temperature fiber products |
| thermocouple | K type |
| Temperature Accuracy | ±1℃ |
| Temp. control | · PID automatic control and auto-tune function. · 30 programmable segments for precise thermal processing. · Built-in protection for the over-heated and broken thermocouple. |
| Heating Zone Length | 200+200+200mm |
| Heating Element | Fe-Cr-Alloy adopted by Mo |
| power | single phase，220V，50Hz |
2、PE system
| Power output range | 0W~500W |
| Maximum reflected power | 100W |
| RF output interface | 50 Ω, N-type, female |
| Power stability | ≤5W |
| Harmonic component | ≤-50dbc |
| Supply voltage | Single-phase AC (187V-253V) Frequency 50/60HZ |
| Overall efficiency | >=70% |
| Power Factor | >=90% |
| cooling method | Forced air cooling |
3、Three-way proton flow control system
| Connector type | Double ferrule stainless steel joint |
| Standard range (N2) | 200sccm，500sccm、1000sccm (Can be customized according to user requirements) |
| Accuracy | ±1.5%F.S |
| Linear | ±1%F.S |
| Repeat accuracy | ±0.2%F.S |
| Response time | Gas characteristics: 1～4 Sec, electrical characteristics: 10 Sec |
| Working pressure range | 0.1～0.5 MPa |
| greatest pressure | 3MPa |
| interface | Φ6,1/4'' |
| display | 4-digit display |
| Working temperature | 5~45 high purity gas |
| Pressure vacuum gauge | －0.1～0.15 MPa, 0.01 MPa/div |
| Shut-off valve | Φ6 |
| Internal and external double throwing stainless steel pipe | Φ6 |
4、Low vacuum unit
| relative humidity | ≤85% |
| working environment | 5℃～40℃ |
| Working voltage | 220V±10% 50~60HZ |
| power | 1KW |
| Pumping rate | 10m³/h |
| Ultimate vacuum | 5X10-1Pa |
| Working pressure range | 1.01325X105～1.33X10-2Pa |
| Withstand voltage | 0.03MPa |
| Oil capacity | 1.1L |
| Inlet port diameter | KF25 |
| Exhaust port diameter | KF25 |
| noise | 50dB |
| Connection method | Using bellows, the manual flapper valve is connected to the bellows |
