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Whatapp:
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
Introduction:
Three temperature controllers of three temperature zone tiltable rotary tubular furnace can independently control the temperature, and can set up 30 temperature rise and fall programs. Temperature zone 1 (the center of heating zone) is heated by silicon molybdenum rod, and the other two temperature zones are heated by silicon carbon rod. This tubular furnace can form a temperature gradient, adjust the temperature of three temperature zones, and prepare functional materials under the thermal gradient, which is also suitable for CVD method Thin film epitaxial growth was made.
Parameters:
Three temperature controllers of three temperature zone tiltable rotary tubular furnace can independently control the temperature, and can set up 30 temperature rise and fall programs. Temperature zone 1 (the center of heating zone) is heated by silicon molybdenum rod, and the other two temperature zones are heated by silicon carbon rod. This tubular furnace can form a temperature gradient, adjust the temperature of three temperature zones, and prepare functional materials under the thermal gradient, which is also suitable for CVD method Thin film epitaxial growth was made.
Parameters:
| Chamber structure | Split door |
| Function | Tilt and rotate: 0-15rpm.Tilt：max 15degree |
| Vacuum pump set | 10pa |
| Mass flow meter three channel | Ar 0-8Slm，C2H2 0-2 slm，C2H2 0-2 slm |
| Temperature Display | LED or LCD Can be customized according to customer needs |
| Max. Temp. | 1000°C |
| Working Temperature | Recommend ≤1000°C |
| Heating Rate | 0~50°C/min (Max. 50°C/min ) |
| Temp. Control Accuracy | ±1°C |
| Tube Size | Stainless steel tube :Total tube size 1.2m. Inner diameter: 200mm.Heating zone:600mm.Lifters: four, total length500mm |
| Temperature Control | PID automatic control via SCR power control |
| Heating curves | 16 steps programmable |
| Chamber material | Alumina Fiber |
