1100℃ PECVD Rotary Furnace with Vacuum Pump

Model：KJ-1200X-S-II-R

Description：

KJ-1200X-S-II-R is a 1000ºC Rotatable Two-Zone Plasma-Enhanced Chemical Vapor Deposition (PE-CVD) system. It consists of a 300W RF (Ratio Frequency) Plasma Generator & Matching Network, and High-Performance Vacuum Pump.

Specific Introduction:
KJ-1200X-S-II-R is a 1000ºC Rotatable Two-Zone Plasma-Enhanced Chemical Vapor Deposition (PE-CVD) system. It consists of a 300W RF (Ratio Frequency) Plasma Generator & Matching Network, and High-Performance Vacuum Pump. Such a system is an excellent tool for heat-treating inorganic compound powders with surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on sample surface).
Parameters:

System Structure	Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced processing which significantly reduces processing-temperature Gear-driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity. Note: Gas tank is not included
Two-Zone Rotary Furnace	Working temp: 1100ºC Max (<1hrs), and 1000ºC for continuous heating Two PID temperature controllers with 30 segments programmable Input Power: 208 - 240 VAC, single phase at max. 1.5KW High purity Alumina fibrous insulation for max. energy saving Gear DC motor drives quartz tube with variable speed 2 - 10 RPM Two zones: each zone length 4" (100 mm), total 8" (200 mm) heating zone
Plasma RF Power Supply	Output Power: 5 -300W adjustable with ± 5% stability RF frequency: 13.56 MHz ±0.005% stability Reflection Power: 100W max. Matching: Automatic Power: 208-240VAC, Single Phase, 50Hz
Sealing Flanges	Standard: 2'' O.D Fused quartz processing tube, please click the pic on the left for details One pair of 1'' SS sealing flange with rotatable gas connector needle valves and are included for immediate use
Sealing Flanges	A pair of 1'' O.D quick disconnect flange with KF25 port is installed on each end of the tube Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the fireline or downstream attachments (such as gas, powder, and electrical delivery lines)
Tube Rotation Speed	0 - 5 RPM variable
Vacuum Pump & Gauge	Dual Stage Vacuum Pump is included in the sale, please click the image on the left to see detail specs KF25 adapter and stainless steel bellows are connected between the pump and tube flange 10E-2 Torr vacuum can be achieved inside the processing tube Note: Vacuum Gauge is available at additional cost
Temperature Control	Two heating zone design with individual temperature controller Precise PID control of heating, cooling rate, and dwell time, 30 programmable segments Built-in overheating & broken thermocouple protection Over-temperature protection and alarm allow for operation without attendant(s) +/- 1 ºC temperature accuracy Two K-type thermocouples (one for each zone) RS485 Communications Port Optional: The furnace may be operated by PC by installing a control module. If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems.
Dimensions & Weight	Furnace: 1400mm L x 600mm W x 1240mm H (with lid opened) Net weight: 400 lbs Shipping Weight: 500lbs
Warranty	One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products page).
Volumetric Feeder and Collector Tank (Optional)	EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treatment. Stainless steel collection tank ( 2 Liter Capacity ) can be installed on the other end of the processing tube to gather the fired powder without exposure to air. Note: contact us for customization details