Six-channel high vacuum PECVD system

Model：KJ-T1200-S60-6ZH-PE

Description：

The six-channel high-vacuum PECVD system is a plasma chemical vapor deposition system composed of a plasma radio frequency power supply, a 1200-degree tube furnace, a molecular pump high vacuum, and a six-channel gas path. This PECVD system can be applie

Product introduction:
KJ-T1200-S60-6ZH-PE is a plasma chemical vapor deposition system composed of plasma radio frequency power supply, 1200 degree tube furnace, molecular pump high vacuum, and six-channel gas path. This PECVD system can be applied to Nano material growth, graphene generation and thin film material preparation and other fields.

Technical Parameters:

product name	Six-channel high vacuum PECVD system
Tube furnace part
Product number	KJ-T1200-S60-6ZH-PE
Furnace tube size	Φ60mmX1400mm Can be customized according to customer needs
Furnace tube material	Quartz tube
Heating zone	400mm
Operating temperature	1100°C
Maximum temperature	1200°C
Temperature control method	N-type thermocouple
way to control	30 sections programmable temperature control
Temperature control accuracy	±1℃
Temperature control protection	With over-temperature and burnout protection function
Heating rate	0-20ºC/min, recommended 10ºC/min
Heating element	Molybdenum resistance wire
Furnace material	Alumina polycrystalline fiber
Flange joint	Standard configuration is equipped with two stainless steel vacuum flanges, mechanical pressure gauge and stainless steel globe valve have been installed
Sealing system	The furnace tube and flange are extruded and sealed with a silica gel O-ring, which is convenient to remove and can be removed repeatedly, and has good air tightness.
Optional	Auxiliary cooling fan
Vacuum system part
name	Vacuum system
The main parameters	1. Using high vacuum molecular pump set, the ultimate vacuum can reach 10-3pa 2. KF25 quick connection, stainless steel bellows, manual baffle valve and flange, vacuum pump connection; 3. Digital vacuum display, its measurement range is 5 ×10-5-1500mbar, high measurement accuracy
Pneumatic system part
name	Six-way mass flow meter
The main parameters	Six-channel precision mass flow meter: touch screen control, digital display, automatic control. Flow range Flow range: 1. MFC 1-MFC6: 0-1000sccm adjustable 2. A mixing tank 3.6 stainless steel needle valves installed on the left side of the gas supply system, can manually control 6 kinds of gases; 4. Inlet and outlet: 6 Inlet 1 out flow control: manual rotary adjustment connection mode: double ferrule connection
Plasma power supply part
name	500W plasma power supply
Power range	0-500W (continuously adjustable)
working frequency	13.56MHZ+0.005%
Operating mode	Continuous output
RF output impedance interface	N-type, female (50Ω)
Power protection settings	DC over-current protection, power amplifier over-temperature protection, reflected power protection
Supply voltage/frequency	Single-phase AC (187V-253V) 50-60HZ
cooling method	Air-cooled
After-sales service	One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty)