Rocker type integrated control PECVD equipment

Model：KJ-PECVD

Description：

Kejia high vacuum PECVD equipment has an integrated control system. It can be operated by rocker-type touch screen. It is composed of tube furnace, vacuum system, gas supply system, radio frequency power supply system, etc. The system is mainly used in th

Product description:
Kejia high vacuum PECVD equipment is composed of tube furnace, vacuum system, gas supply system, radio frequency power supply system, etc. The system is mainly used in the growth of metal thin films, ceramic thin films, composite thin films, graphene, etc. The PECVD system has the advantages of high film deposition rate, good uniformity, high consistency and stability.

Main features of PECVD system:
1. Change the gas in the quartz vacuum chamber to an ion state through the radio frequency power supply.
2. PECVD requires a lower temperature than ordinary CVD for chemical vapor deposition.
3. PECVD has higher chemical vapor deposition rate, better uniformity, consistency and stability than ordinary CVD.
4. Widely used in the growth of various thin films, such as SiOx, SiNx, SiOxNy and amorphous silicon (a-Si:H).

Main technical parameters of the equipment:

Product name	High vacuum PECVD system
Model number	KJ-PECVD
Part I Slide Rail Tube Furnace Part
Furnace tube size	Φ25mmX1600mm (final length depends on final design.)
Furnace tube material	Quartz tube
Heating zone	200+200mm (dual zone) Customizable
Operating temperature	≤1100°C
Maximum temperature	1200°C for limiting
Temperature control method	N-type thermocouple
way to control	Touch screen control, with independent rocker arm, you can adjust the angle of the temperature control screen according to actual needs, making it more convenient to use
Temperature control accuracy	±1℃
Temperature control protection	With over-temperature and burnout protection function
Heating rate	recommended ≤10ºC/min, max. 20ºC/min
Heating element	resistance wire
Furnace material	Alumina polycrystalline fiber
Furnace structure	The furnace body has a slide rail, which can realize rapid heating and cooling
Vacuum Flange	Standard configuration is equipped with two stainless steel vacuum flanges, mechanical pressure gauge and stainless steel globe valve have been installed
Sealing system	The furnace tube and flange are extruded and sealed with a silica gel O-ring, which is convenient to remove and can be removed repeatedly, and has good air tightness.
Case	Carbon Steel or Stainless steel housing
Optional	Auxiliary cooling fan
Part II Vacuum System Part
name	Vacuum system
The main parameters	1. Using Chinese brand high vacuum molecular pump set, the ultimate vacuum degree can reach 6.7x10^-3pa (In empty and cold state) 2. KF25 quick connection, stainless steel bellows, manual flapper valve and flange, vacuum pump connection; 3. Digital vacuum display, its measuring range is 5×10^-5-1500mbar, with high measuring accuracy
Part III Gas supply system part
Name	Four-way mass flow meter
The main parameters	Four-channel precision mass flow meter: touch screen control, digital display, automatic control. 1.Flow range: MFC 1-MFC3: 0-1000sccm adjustableMFC1: CH4 0-10sccm MFC2: H2 0-200sccm MFC3:0-200sccm MFC4: 0-300sccm Control accuracy: +-1.5% F.S. 2. A mixing tank 3. 4 stainless steel needle valves are installed on the left side of the gas supply system, which can manually control 4 kinds of gases; 4. Air inlet and outlet: 4 in and 1 out Flow control: LCD Touch screen Note:Liquid or corrosion gas not supported.
Part IV Plasma power supply part
Name	500W plasma power supply
Power range	0-500W (continuously adjustable)
working frequency	13.56MHZ+0.005%
Operating mode	Continuous output
RF output impedance interface	N-type, female (50Ω)
Power stability	≤2W
Maximum reflected power	70W
Power protection settings	DC over current protection, power amplifier over temperature protection, reflected power protection
cooling method	Air cooling
After-sales service	One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty)