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Whatapp:
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
Equipment introduction:
PECVD is to use microwave or radio frequency to ionize the gas containing the constituent atoms of the film to form plasma locally, and the plasma is very chemically active and easy to react, and the desired film is deposited on the substrate. This system is widely used in deposition. High quality, SiO2 film, Si3N4 film, diamond film, hard film, optical film and carbon nanotube (CNT), graphene material, etc.
Main functions and features:
1. The heating element adopts molybdenum-doped alloy heating wire, and the furnace insulation material adopts imported polycrystalline fiber material, which has good thermal insulation performance, durability, high tensile strength, no miscellaneous balls, high purity, and the energy-saving effect is obviously better than domestic fiber materials.
2. The entire furnace body adopts a double-layer liner structure with air gap isolation in the middle. Even if the furnace temperature is as high as 1200°C, the surface of the furnace body can still be safely touched without feeling hot.
3. The furnace is made of energy-saving materials, and the energy consumption of the whole machine is only 1/3 of that of the same traditional electric furnace, which is energy-saving and environmentally friendly.
4. The furnace body is equipped with: output voltage and output current monitoring meter, the heating status of the furnace can be seen at a glance.
5. Over-temperature alarm and power off, leakage protection, safe and reliable operation with multiple protection functions.
Specifications
PECVD is to use microwave or radio frequency to ionize the gas containing the constituent atoms of the film to form plasma locally, and the plasma is very chemically active and easy to react, and the desired film is deposited on the substrate. This system is widely used in deposition. High quality, SiO2 film, Si3N4 film, diamond film, hard film, optical film and carbon nanotube (CNT), graphene material, etc.
Main functions and features:
1. The heating element adopts molybdenum-doped alloy heating wire, and the furnace insulation material adopts imported polycrystalline fiber material, which has good thermal insulation performance, durability, high tensile strength, no miscellaneous balls, high purity, and the energy-saving effect is obviously better than domestic fiber materials.
2. The entire furnace body adopts a double-layer liner structure with air gap isolation in the middle. Even if the furnace temperature is as high as 1200°C, the surface of the furnace body can still be safely touched without feeling hot.
3. The furnace is made of energy-saving materials, and the energy consumption of the whole machine is only 1/3 of that of the same traditional electric furnace, which is energy-saving and environmentally friendly.
4. The furnace body is equipped with: output voltage and output current monitoring meter, the heating status of the furnace can be seen at a glance.
5. Over-temperature alarm and power off, leakage protection, safe and reliable operation with multiple protection functions.
Specifications
| Product name | Tubular PECVD system (CE certification) |
| Slide tube furnace part | |
| Model | KJ-T1200 |
| Heating zone length | 300mm |
| Furnace tube size | diameter 120*1600mm |
| Working temperature | ≦1100℃ |
| Max. temperature | 1200℃ |
| Temperature measuring element | K type thermocouple |
| Temperature Control System | 30-segment PID microcomputer programmable automatic control |
| Insulation temperature control accuracy | ±1℃ |
| temperature protection | With over temperature and burnout protection function |
| Heating rate | 0-20ºC/min |
| Heating element | High resistance electric heating alloy wire OCr27A17Mo |
| Operating Voltage | AC220V single phase 50HZ |
| rated power | 4KW |
| chamber material | Using polycrystalline fiber furnace material, the material has good thermal insulation performance, high reflectivity and balanced temperature field |
| sealing system | The furnace tube and the flange are squeezed and sealed with O-rings, which are easy to disassemble, can be disassembled repeatedly, and have good air tightness. |
| Furnace tube | High purity quartz tube |
| French | 304 stainless steel sealing flange, installed mechanical pressure gauge and stainless steel globe valve, easy to disassemble and take out materials |
| Furnace structure | Cr-plated thick steel plate two-way slide rails can realize the movement of the tube furnace to achieve rapid heating and cooling |
| Furnace shell temperature | ≤45℃ |
| vacuum system part | |
| name | DRV16 Rotary Vane Pump 4L/S |
| The main parameters | Ultimate vacuum degree 10Pa (including KF25 interface, vacuum baffle valve and movable box) |
| vacuum display | Resistance digital display vacuum gauge, display range standard atmospheric pressure--10-1pa |
| Air system part | |
| name | Four-way mass flow meter |
| Gas line | four way |
| flow control | Digital display, each channel of gas contains a needle valve for separate control, and the gas flow is automatically controlled |
| Air inlet and outlet | Four in and one out, built-in precision mixing tank |
| link method | Double Ferrule Fitting |
| flow range | MFC1-MFC4：0-500sccm（range optional) |
| control precision | About ±1.5%F.S, different ranges, slightly different |
| Working temperature | 5℃-45℃ |
| Plasma radio frequency part | |
| name | RF automatic matcher |
| Matching power range | 0-500W |
| working frequency | 13.56MHZ+0.005% |
| Normal working reflected power | ＜3W |
| match time | ＜3S |
| transmission efficiency | ＞90% |
| Matching power supply | AC220V/50-60HZ |
