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CVD tube furnace for carbon nanotube growth
  • CVD tube furnace for carbon nanotube growth
  • CVD tube furnace for carbon nanotube growth
  • CVD tube furnace for carbon nanotube growth
  • CVD tube furnace for carbon nanotube growth
  • Model:KJ-TCVD1200

    CVD tube furnace for carbon nanotube growth

    Description:

    In the fields of semiconductor manufacturing, automotive industry, general machinery, digital products, light-emitting diodes, etc., they provide these products with better wear resistance, corrosion resistance and other properties....

    Introduction:
    The CVD tube furnace is the core equipment for in-situ growth of carbon nanotubes on the surface of carbon fiber and other substrates through chemical vapor deposition (CVD) technology. Its core structure includes a sealed furnace tube, a multi-way gas supply system, a vacuum module and a program temperature control system. The furnace chamber is usually made of corundum or alumina fiber materials, and the operating temperature can reach 1050°C-1200°C, supporting the controllable growth of nanomaterials in an inert or reactive gas environment.

    cvd system
     
     

    features
    • Precision temperature control: Adopting multi-stage program temperature control (such as 30-stage curve) and corundum furnace, the temperature field uniformity is high (such as ±0.5°C/24h), and the heating rate is fast.

    • Multi-gas path design: integrated 2-5 gas mixing system, supporting float/mass spectrometer flowmeter to accurately control the reaction gas ratio.

    • High efficiency vacuum: the ultimate vacuum reaches 10⁻³Pa, reducing impurity interference and improving carbon tube purity.

    • Energy saving and consumption reduction: The third-generation horizontal furnace has lower energy consumption than the traditional tube furnace, the constant temperature time is shortened by 50% (45-60 minutes), and the purity after pickling is >98%.

    Technical Parameters
    Tube Furnace Part
    Product model KJ-TCVD1200
    Maximum temperature 1200℃
    Working temperature ≦1100℃
    Heating zone 200mm Customizable
    Heating element Molybdenum alloy resistance wire
    Heating rate 0-20ºC/min, 10C/min recommended
    Tube size Diameter 50*600mm Customizable
    Tube material High-purity quartz tube
    Tube plugging Metal screen on the left, detachable
    Temperature control system 7-inch touch screen control
    Temperature control protection With over-temperature and broken couple protection function
    Temperature measuring element N-type thermocouple
    Temperature control accuracy ±1℃
    Furnace material Polycrystalline fiber material
    Flange Stainless steel sealed water-cooled flange, quartz lens on the right flange end
    Sealing system O-ring extrusion seal is used between the furnace tube and the flange;
      Dynamic seal is used between the rotating motor and the flange
    Furnace structure Outer shell is made of stainless steel, double-layer liner structure, and the furnace door is opened manually
    Furnace shell temperature ≤55℃
    Rotation System
    Speed ​​​​ 200r/min
    Connection method Coupling connection with shaft dynamic seal transmission
    Vacuum System
    Name DRV10 rotary vane pump 2L/S
    Main parameters Ultimate vacuum ≤10Pa
    Vacuum gauge Resistance gauge + film gauge
    Pressure control Working pressure 0.04-0.06Mpa
    Filter Vacuum pump equipped with special filter device
    Pressure gauge Mechanical pressure gauge
    Gas System
    Air path One nitrogen
    Flow control Touch screen display
    Flow range 500SCCM
    Control accuracy ±1.5%F.S
    Inlet interface 1 manual valve + 1 solenoid valve
    Exhaust interface 1 manual valve

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